发明名称 NON-VOLATILE MEMORY DEVICE AND METHOD FOR FABRICATING THE SAME
摘要 A non-volatile memory device includes a peripheral circuit region and a cell region. A method for fabricating the non-volatile memory device includes forming gate patterns over a substrate, the gate pattern including a tunnel insulation layer, a floating gate electrode, a charge blocking layer and a control gate electrode, and removing the control gate electrode and the charge blocking layer of the gate pattern formed in the peripheral circuit region.
申请公布号 KR101149044(B1) 申请公布日期 2012.05.24
申请号 KR20090038541 申请日期 2009.04.30
申请人 发明人
分类号 H01L21/8247;H01L27/115 主分类号 H01L21/8247
代理机构 代理人
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