| 摘要 |
Provided is a method that can include forming a gate dielectric layer, a first diffusion layer, and a hard mask layer on a substrate defined to include first and second spaced apart regions, forming a photoresist pattern on the hard mask layer in the first region and exposing the hard mask layer on the second region, removing the exposed hard mask layer on the second region and the first diffusion layer on the second region to expose the gate dielectric layer on the second region, removing the photoresist pattern, forming a second diffusion layer on uppermost surfaces of the first and second regions, and performing a heat treatment process to diffuse a first diffusion material included in the first diffusion layer and a second diffusion material included in the second diffusion layer. |
