发明名称 CURABLE COMPOSITION FOR IMPRINT
摘要 <P>PROBLEM TO BE SOLVED: To provide a microstructure having excellent reflectance, pencil hardness and crack resistance. <P>SOLUTION: (1) There is provided a curable composition for imprint which does not substantially have an alkali developing group but has a polymer (X) with a polymerizable group in the side-chain. (2) There is provided the curable composition for imprint as described in (1), in which the polymerizable group comprises at least one kind selected from vinyl ether group, epoxy group, oxetane group and (meta)acrylate group. (3) There is provided the curable composition for imprint as described in (1), in which the polymer (X) comprises at least one kind selected from repeating units represented by following formulas (Xa)-(Xd). <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012099638(A) 申请公布日期 2012.05.24
申请号 JP20100246091 申请日期 2010.11.02
申请人 FUJIFILM CORP 发明人 KODAMA KUNIHIKO
分类号 H01L21/027 主分类号 H01L21/027
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