发明名称 METHOD OF PRODUCTION OF SEMICONDUCTOR THIN FILMS
摘要 A method of manufacturing (AgxCu1-x)2ZnSn(SySe1-y)4 thin films, the method comprising - providing a thin film comprising Ag and/or Cu, the thin film further comprising Zn; and annealing the thin film in an atmosphere comprising S and/or Se, and further comprising Sn.
申请公布号 WO2012066116(A1) 申请公布日期 2012.05.24
申请号 WO2011EP70436 申请日期 2011.11.18
申请人 UNIVERSITE DU LUXEMBOURG;TDK CORPORATION;BERG, DOMINIK;REDINGER, ALEX;DALE, PHILLIP;SIEBENTRITT, SUSANNE 发明人 BERG, DOMINIK;REDINGER, ALEX;DALE, PHILLIP;SIEBENTRITT, SUSANNE
分类号 C23C14/58;C23C14/06;C25D5/50;H01L31/032 主分类号 C23C14/58
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