| 发明名称 |
LIGHT SOURCE FORMING METHOD, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD |
| 摘要 |
<P>PROBLEM TO BE SOLVED: To form an illumination light source reproducing a target illumination light source shape accurately. <P>SOLUTION: A light source forming method comprises the steps of: linking a plurality of mirror elements SE<SB POS="POST">k</SB>(k=1 to K) to a necessary number N of lens elements FL<SB POS="POST">n</SB>(n=1 to N) (a plurality of corresponding groups a to f thereto) to form a target illumination light source shape Ψ<SB POS="POST">0</SB>in a plurality of lens elements FL<SB POS="POST">n</SB>at every unit number (N, for example), in order of light intensity Φ<SB POS="POST">0k</SB>reflected by each mirror element; exchanging at least each one mirror element from mirror elements SE<SB POS="POST">k</SB>linked to respective two lens elements in the necessary number N of lens elements FL<SB POS="POST">n</SB>(n=1 to N) so as to average sum of light intensities Φ<SB POS="POST">0k</SB>with respect to the mirror elements SE<SB POS="POST">k</SB>linked to respective two lens elements. Consequently, an illumination light source reproducing a target illumination light source shape can be formed. <P>COPYRIGHT: (C)2012,JPO&INPIT |
| 申请公布号 |
JP2012099686(A) |
申请公布日期 |
2012.05.24 |
| 申请号 |
JP20100247058 |
申请日期 |
2010.11.04 |
| 申请人 |
NIKON CORP |
发明人 |
FUJIMURA YOSHIHIKO;MATSUO NORIYUKI |
| 分类号 |
H01L21/027;G02B19/00;G03F7/20 |
主分类号 |
H01L21/027 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
