| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a microscope capable of forming a beam spot in a desired shape on a focal plane. <P>SOLUTION: Provided are a modulation optical element 38 for performing spatial modulation on illumination light and having a plurality of regions, and an adjustment element 37 for adjusting an optical characteristic of the illumination light subjected to modulation by the modulation optical element 38. The adjustment element adjusts the illumination light transmitted through the modulation optical element so as to cancel at least one asymmetrical component of transmissivity and phase having an optical axis of the illumination light at the center between the plurality of regions of the modulation optical element. <P>COPYRIGHT: (C)2012,JPO&INPIT |
