发明名称 METHOD OF MANUFACTURING STRUCTURE HAVING PATTERN
摘要 <P>PROBLEM TO BE SOLVED: To provide a method and a device of manufacturing a structure having a novel pattern capable of changing an once formed pattern, and to provide a method of producing a mold. <P>SOLUTION: In the method of manufacturing a structure having a pattern, an elastically deformable work piece is deformed elastically in the in-plane direction from the first state, a pattern member composed to contain a material different from that of the work piece is formed on the surface of the work piece in deformed state, and then the work piece is approached or returned to the first state while maintaining the contact area of the pattern member and the work piece. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012099835(A) 申请公布日期 2012.05.24
申请号 JP20110276650 申请日期 2011.12.19
申请人 CANON INC 发明人 NAKAMURA TAKASHI;IMADA AYA;DEN TORU
分类号 H01L21/027;B29C59/02 主分类号 H01L21/027
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