VERTICALLY OSCILLATING DEVICE FOR SUBSTRATE, SUBSTRATE STAGE DEVICE, AND ION IMPLANTATION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a vertically oscillating device for substrate which moves a position in a vacuum chamber; a substrate stage device for reciprocating a substrate in a vertical direction and in a horizontal direction in the vacuum chamber; and an ion implantation device.

SOLUTION: The vertically oscillating device for substrate provided in the vacuum chamber 11 comprises: arm parts 33a and 33b which rotate up and down around a rotation axis 37; vertical rails 32a and 32b which are vertically fixed to a main body 31; vertical direction moving members 34a and 34b which move up and down along the vertical rails 32a and 32b; a vertical direction extraction member which extracts a vertical component of a rotation movement of the arm parts 33a and 33b and moves the vertical direction moving members 34a and 34b by an extracted amount of the movement. A substrate holder 21 is provided on one vertical direction moving member 34a and a weight 25 is provided on the other vertical direction moving member 34b. The substrate stage device 30 comprises the vertically oscillating device for substrate and a horizontally oscillating device for substrate which moves the vertically oscillating device for substrate right and left in the vacuum chamber 11.

COPYRIGHT: (C)2012,JPO&INPIT