发明名称 |
IMAGING OPERATIONS FOR A WIRE BONDING SYSTEM |
摘要 |
A method of imaging a feature of a semiconductor device is provided. The method includes the steps of: (a) imaging a first portion of a semiconductor device to form a first imaged portion; (b) imaging a subsequent portion of the semiconductor device to form a subsequent imaged portion; (c) adding the subsequent imaged portion to the first imaged portion to form a combined imaged portion; and (d) comparing the combined imaged portion to a reference image of a feature to determine a level of correlation of the combined imaged portion to the reference image.
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申请公布号 |
US2012128229(A1) |
申请公布日期 |
2012.05.24 |
申请号 |
US201113293727 |
申请日期 |
2011.11.10 |
申请人 |
SUCRO PAUL W.;WANG ZHIJIE;SOOD DEEPAK;LISTER PETER M.;KULICKE AND SOFFA INDUSTRIES, INC. |
发明人 |
SUCRO PAUL W.;WANG ZHIJIE;SOOD DEEPAK;LISTER PETER M. |
分类号 |
G06K9/00 |
主分类号 |
G06K9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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