| 摘要 |
<P>PROBLEM TO BE SOLVED: To accurately measure an impurity concentration by improving a lower limit of detection of impurities at a desired point to be measured. <P>SOLUTION: A method for measuring impurities on a surface includes the following steps: a solvent is dropped on a point to be measured on a surface of an object to be measured 200; a sample solution 300 is prepared while the solvent is held on a solvent holding member (such as a diced base plate 420) for retaining the solvent in place which is placed on a part area of the object to be measured 200; the sample solution 300 is extracted at a solvent extraction part 560; and an impurity analysis of the sample solution 300 is performed. <P>COPYRIGHT: (C)2012,JPO&INPIT |
