发明名称 METHOD FOR MATCHING OF PATTERNS
摘要 A method for matching of two detailed patterns is disclosed in which abstracts of each of the detailed patterns are created, where the abstracts are less complex than the detailed patterns. The abstracts are then compared to determine if the detailed patterns may possibly match, where comparison of the abstracts is faster than comparison of the detailed patterns. If comparison of the abstracts indicates a possible match, then the detailed patterns are compared, otherwise no detailed pattern comparison is needed.
申请公布号 WO2012068323(A2) 申请公布日期 2012.05.24
申请号 WO2011US61108 申请日期 2011.11.17
申请人 D2S, INC.;FUJIMURA, AKIRA;KRONMILLER, THOMAS;JACQUES, ETIENNE;ZABLE, HAROLD ROBERT 发明人 FUJIMURA, AKIRA;KRONMILLER, THOMAS;JACQUES, ETIENNE;ZABLE, HAROLD ROBERT
分类号 H01L21/66;H01L21/00;H01L21/027 主分类号 H01L21/66
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