| 摘要 |
<P>PROBLEM TO BE SOLVED: To suppress surface corrosion of an introduction valve for introducing halogen-containing gas to an external apparatus and to suppress the degradation of a sealing material used for the introduction valve. <P>SOLUTION: There is provided a halogen-containing gas supply apparatus, which supplies a halogen-containing gas to the external apparatus 100 from a container 1 filled with the halogen-containing gas with high pressure. The halogen-containing gas supply apparatus includes: a supply valve 4 for supplying the halogen-containing gas from the container; and a shock wave preventing mechanism 50, which is provided in the downstream of the supply pipe 4, and which prevents shock waves from being generated. <P>COPYRIGHT: (C)2012,JPO&INPIT |
