| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a functional element, a method for manufacturing the functional element, a physical quantity sensor, and an electronic apparatus having the physical quantity sensor which achieve at least one of high sensitivity, improvement of manufacturing efficiency, cost reduction, and high reliability. <P>SOLUTION: A functional element 1 of the present invention includes an insulating substrate 2, a movable part 33, movable electrode fingers 361-365 provided in the movable part 33, and fixed electrode fingers 381-388 provided on the insulating substrate 2 and arranged so as to be opposed to the movable electrode fingers 361-365. The fixed electrode fingers 381-388 include first fixed electrode fingers 382, 384, 386, 388 arranged on one side of the movable electrode fingers 361-365 and second fixed electrode fingers 381, 383, 385, 387 arranged on the other side of the movable electrode fingers 361-365. The each first fixed electrode finger and the each second fixed electrode finger are arranged separately from each other. <P>COPYRIGHT: (C)2012,JPO&INPIT |
