发明名称 APPARATUS AND METHOD FOR WATER STERILIZATION
摘要 <P>PROBLEM TO BE SOLVED: To provide a water sterilization apparatus capable of sterilizing various bacteria in target water thoroughly by promoting contact of target water with plasma. <P>SOLUTION: Target water 17 containing various bacteria is fed to a step-like passage 11, in which two or more stepped parts and two or more flat plate parts connected to the stepped parts are arranged alternately, from water supply piping 12 arranged in the upper step part of the step-like passage 11. At the same time, the target water 17 containing various bacteria and flowing through the step-like passage 11 in a film form is irradiated with plasma generated in a plasma generator 13 to dissociate water molecules in the target water 17 into O and OH radicals, and various bacteria contained in the target water 17 are sterilized with the O and OH radicals. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012096141(A) 申请公布日期 2012.05.24
申请号 JP20100244140 申请日期 2010.10.29
申请人 TOKYO ELECTRON LTD 发明人 MORIYA TAKESHI;DENPO KAZUKI
分类号 C02F1/30;C02F1/48;C02F1/70;C02F1/72 主分类号 C02F1/30
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