| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing an optical waveguide with a groove, which can reduce burrs generated at an edge of an optical waveguide when forming a groove by cutting the optical waveguide having at least a clad layer and a core layer laminated on the clad layer, and to provide an optical waveguide with a groove, which can be obtained by the manufacturing method, and an opto-electric composite substrate having the optical waveguide with a groove. <P>SOLUTION: A method for manufacturing an optical waveguide with a groove includes a first step in which a tip of a cutting blade of a circular rotary blade is lowered to a boundary surface between a core layer and a clad layer or a position on the core layer side nearer than the boundary surface, and the core layer is cut from the core layer side, and a second step in which the tip of the cutting blade of the circular rotary blade is lowered to a position lowered to the clad layer side from the boundary surface by 7 to 18 μm, and the core layer and the clad layer are cut from the core layer side. <P>COPYRIGHT: (C)2012,JPO&INPIT |
