发明名称 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME, AND ELECTRIC DEVICE
摘要 It is an object of the present invention to simplify steps needed to process a wiring in forming a multilayer wiring. In addition, when a droplet discharging technique or a nanoimprint technique is used to form a wiring in a contact hole having a comparatively long diameter, the wiring in accordance with the shape of the contact hole is formed, and the wiring portion of the contact hole is likely to have a depression compared with other portions. A penetrating opening is formed by irradiating a light-transmitting insulating film with laser light having high intensity and a pulse high in repetition frequency. A plurality of openings having a minute contact area is provided instead of forming one penetrating opening having a large contact area to have an even thickness of a wiring by reducing a partial depression and also to ensure contact resistance.
申请公布号 US2012126226(A1) 申请公布日期 2012.05.24
申请号 US201213365498 申请日期 2012.02.03
申请人 KUWABARA HIDEAKI;YAMAMOTO HIROKO;SEMICONDUCTOR ENERGY LABORATORY CO., LTD. 发明人 KUWABARA HIDEAKI;YAMAMOTO HIROKO
分类号 H01L29/78 主分类号 H01L29/78
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