CORROSION-RESISTANT MEMBER COATED WITH ALUMINUM NITRIDE, AND METHOD FOR PRODUCING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a corrosion-resistant member which is not curved and deformed and is excellent in dimensional precision when the surface of a heat-resistant member is coated with an aluminum nitride (AIN) coating film (layer).

SOLUTION: The corrosion-resistant member is constituted in the following. Oxygen is contained at a rate of at least 0.1 mass% and at most 20 mass% in AIN in the crystal particles of a coating film, and an adjustment is made so that the thermal expansion coefficient of the coating film may accord with that of a base material +. The relative density of the coating film is preferably at least 50 and less than 98%. Preferably, the coating film is formed by a chemical gas phase growth method and then is heated at a temperature of at least 700°C and at most 1,150°C in an oxygen atmosphere, or the coating film is exposed to the atmosphere to form a hydrate and then is heated at a temperature of at least 900°C and at most 1,300°C in an inert atmosphere.

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