| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an optical characteristic of a metal thin film measurement device and an optical characteristic of a metal thin film measurement method which are capable of accurately and easily measuring the optical characteristic of the metal thin film based on a method for measuring the enhancement degree of an electric field by applying a surface plasmon resonance (SPR) phenomenon. <P>SOLUTION: By irradiating with first excitation light, surface plasmon light is generated on the surface of a metal thin film. By irradiating the metal thin film with second excitation light different from the first excitation light, second light is generated on the surface of the metal thin film, and an interference fringe of the surface plasmon light and the second light is generated. While changing the light volume of the second excitation light, an interference fringe pitch and a propagation length are measured when the contrast of the interference fringe is the maximum. The optical characteristic of the metal thin film is calculated based on the interference fringe pitch and the propagation length. <P>COPYRIGHT: (C)2012,JPO&INPIT |
