发明名称 SEMICONDUCTOR MEMORY DEVICE AND METHOD OF FORMING THE SAME
摘要 Provided may be a semiconductor memory device and a method of forming the semiconductor memory device. The memory device of example embodiments may include a bit line structure including a bit line on a semiconductor substrate, and a buried contact plug structure including a buried contact pad and a buried contact plug that extends in a lower portion of the bit line from one side of the bit line and connected to the buried contact pad. A width of the buried contact plug near a top surface of the buried contact pad may be greater than a width of the buried contact plug adjacent to the bit line.
申请公布号 US2012126426(A1) 申请公布日期 2012.05.24
申请号 US201213351503 申请日期 2012.01.17
申请人 SHIN KYOUNG-SUB 发明人 SHIN KYOUNG-SUB
分类号 H01L23/52 主分类号 H01L23/52
代理机构 代理人
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