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发明名称
HOLLOW CATHODE SHOWERHEAD
摘要
申请公布号
KR20120053003(A)
申请公布日期
2012.05.24
申请号
KR20127004542
申请日期
2010.07.21
申请人
APPLIED MATERIALS, INC.
发明人
QUACH DAVID;ISHIKAWA TETSUYA;KRYLIOUK OLGA;BURROWS BRIAN;TAM ALEXANDER;POON TZE;CHANG ANZHONG
分类号
H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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