发明名称 METHOD OF MANUFACTURING SUBSTRATE
摘要 <P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a substrate that allows for application of a heat imprinting method to a large area base material or a non-flexible base material. <P>SOLUTION: The method of manufacturing a substrate having a base material, and a film arranged at least on one surface of the base material and provided, on the surface thereof, with a predetermined uneven pattern sequentially includes at least a step A for coating the base material with a solution containing a thermosetting material, a step B for pressing a mold having a reversal pattern of a desired uneven pattern against the solution applied onto the base material, and a step C for forming a film provided, on the surface thereof, with the uneven pattern on the base material by heating the solution in a state where the mold is pressed thereby solidifying the solution. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012099731(A) 申请公布日期 2012.05.24
申请号 JP20100247716 申请日期 2010.11.04
申请人 ULVAC JAPAN LTD 发明人 HIRAOKA KENSUKE;SAKIO SUSUMU
分类号 H01L31/04 主分类号 H01L31/04
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