| 摘要 |
<P>PROBLEM TO BE SOLVED: To carry out the inspection of a solar battery panel or a solar battery cell without being influenced by disturbance light and an external magnetic field, while suppressing a manufacturing cost. <P>SOLUTION: A solar battery panel SP which connects resistances between electrodes through conducting wires is mounted on a stage 40. A light-emitting element 50, a light-emitting signal supply circuit 65, and a light source driving circuit 66 irradiate the entire surface of the solar battery panel SP with light changing its intensity in a predetermined cycle. A sensor signal extraction circuit 67 and a lock-in amplifier 68 detect a magnetic field which is generated when a current is made to pass through an inspection object by the irradiation of the light, and which changes its intensity in the same cycle as the predetermined cycle. <P>COPYRIGHT: (C)2012,JPO&INPIT |
