| 发明名称 |
CONTACT TYPE SHAPE MEASURING APPARATUS |
| 摘要 |
An acting force is applied to a probe on the basis of a target speed serving as a probe speed in a stable copy scanning state of a target surface to be measured and a probe speed error serving as a difference between the target speed and a probe speed.
|
| 申请公布号 |
US2012125088(A1) |
申请公布日期 |
2012.05.24 |
| 申请号 |
US201113292838 |
申请日期 |
2011.11.09 |
| 申请人 |
MIYATA AKINORI;CANON KABUSHIKI KAISHA |
发明人 |
MIYATA AKINORI |
| 分类号 |
G01B5/20 |
主分类号 |
G01B5/20 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
