METHOD FOR MANUFACTURING A MOS-FIELD EFFECT TRANSISTOR

摘要

A method for manufacturing a Power Metal-Oxide-Semiconductor Field-Effect-Transistor (MOSFET) has the steps of: implanting a base region of the Power MOSFET within an epitaxial layer of a semiconductor chip comprising an insulated gate structure, implanting a source link region on one side of the gate through a first mask, wherein the first mask is partially formed by an edge of the gate, the source link extending from a surface into the epitaxial layer and having a width defined by the first window, subsequently forming a spacer extending from the edge of the gate which defines the first window and forming a second mask which is partially formed by the spacer, and implanting a source region through the second mask.