PROXIMITY EXPOSURE DEVICE AND PROXIMITY EXPOSURE METHOD

摘要

An illumination optical system (70) comprises: a light source (73); an integrator (74) which is constructed from a fly eye lens comprising a plurality of lens cells, and makes the intensity of light from the light source (73) uniform; and a movable light occluding member (78) which is provided on the incident surface side of the integrator (74), and occludes light that is incident at any of the plurality of lens cells in such a way that variable setting is performed to a specified collimation half angle. Thus, the collimation half angle is variably set, and a high-resolution pattern having a desired line width can be obtained.