发明名称 SEMICONDUCTOR APPARATUS AND FABRICATION METHOD OF THE SAME
摘要 PURPOSE: A semiconductor device and a manufacturing method thereof are provided to arrange a wafer test related composition on a sawing region on the boundary of a scribe line of a wafer, thereby preventing a chip size increase due to the wafer test related composition. CONSTITUTION: A semiconductor chip(100) is formed on a predetermined region of a wafer. A wafer test block(WTB) and a wafer test pad(WP) are formed on the outer region of the predetermined region. A signal line electrically connects the wafer test block and the semiconductor chip. A through silicon via(TSV) penetrates the signal line in a vertical direction of the signal line. A switching device is electrically connected to the signal line.
申请公布号 KR20120052555(A) 申请公布日期 2012.05.24
申请号 KR20100113769 申请日期 2010.11.16
申请人 SK HYNIX INC. 发明人 SHIN, SANG HOON
分类号 H01L21/66 主分类号 H01L21/66
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