| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a transporting device capable of regulating horizontal movement of a semiconductor wafer even when the semiconductor wafer lifted in a noncontact state is warped or hung down in its outer peripheral section by self-weight. <P>SOLUTION: The transporting device includes a non-contact type suction holding part 21 provided in a center region 20a of a base part 20, and a regulating part 22 provided in an outer peripheral region 20b of the base part 20, for regulating horizontal movement of a work W. The regulating part 22 having a contact surface 223a with the work W is arranged in such a manner that the contact surface 223a can be vertically moved with respect to the base part 20. The contact surface 223a is vertically moved between a lower position and an upper position, the lower position at which the contact surface 223a is brought into contact with an outer peripheral portion upper surface W1 of the work W positioned below a center portion upper surface of the curved work W, the upper position to which the contact surface 223a at the lower position is pressurized onto a table 5 via the work W to be escaped upward from the lower position. Accordingly, the transporting device can regulate horizontal movement of a plate-like object even when the lifted work W is warped. <P>COPYRIGHT: (C)2012,JPO&INPIT |
