| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method and a device for uniformly heating a large-size plate-like substrate by preventing the lifting of the substrate owing to thermal expansion. <P>SOLUTION: A substrate heater 1 operable to uniformly heat a plate-like substrate comprises at least: a heating plate 2 for heating the plate-like substrate 3 by placing and bringing the substrate on and into contact with the heating plate; a cover 4 for covering the heating plate 2 as if enveloping the plate; and a controller capable of controlling the heating plate 2 and the cover 4. The heating plate 2 includes, at least, a plurality of workpiece-receiving pins for supporting the plate-like substrate 3, a driving mechanism capable of controlling the workpiece-receiving pins by use of the controller, and a heating mechanism capable of controlling the heating plate 2 while by use of the controller. <P>COPYRIGHT: (C)2012,JPO&INPIT |
