发明名称 |
PROCESS TO MAKE PMR WRITER WITH LEADING EDGE SHIELD (LES) AND LEADING EDGE TAPER (LET) |
摘要 |
Methods for fabrication of leading edge shields and tapered magnetic poles with a tapered leading edge are provided. The leading edge shield may be formed by utilizing a CMP stop layer. The CMP stop layer may aid in preventing over polishing of the magnetic material. For the tapered magnetic poles with a tapered leading edge, a magnetic material is deposited on a planarized surface, a patterned resist material is formed, and exposed magnetic material is etched to form at least one tapered surface of the magnetic material. |
申请公布号 |
US2012127612(A1) |
申请公布日期 |
2012.05.24 |
申请号 |
US20100954422 |
申请日期 |
2010.11.24 |
申请人 |
SHIN KYUSIK;ZHONG QIPING;ZHU HONGLIN;CHEN YINGJIAN;HONG LIUBO;LIU FENGLIN |
发明人 |
SHIN KYUSIK;ZHONG QIPING;ZHU HONGLIN;CHEN YINGJIAN;HONG LIUBO;LIU FENGLIN |
分类号 |
G11B5/10;G01R1/16 |
主分类号 |
G11B5/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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