发明名称 |
ECHING APPARATUS WITH GUIDE BLADE |
摘要 |
PURPOSE: An etching apparatus equipped with a guide blade is provided to prevent from precipitation of sludge into a spraying tool and attachment of sludge to a guide blade and a glass. CONSTITUTION: An etching apparatus equipped with a guide blade comprises a guide vane(10) and a spraying tool(20). The guide blade comprises a first and second side portions(12) which are mutually distanced and is formed along the longitudinal direction. An interval between the first and the second side portions are gradually narrower by moving towards a gravity direction. The spraying tool is located along the longitudinal directions of the first and the second side portions. The etchant is sprayed towards the first and the second side portions. |
申请公布号 |
KR20120051842(A) |
申请公布日期 |
2012.05.23 |
申请号 |
KR20100113154 |
申请日期 |
2010.11.15 |
申请人 |
FIS CO., LTD. |
发明人 |
LEE, TAI HUI;PARK, JAE SIN;KIM, YU CHAN |
分类号 |
C03C15/00;C25F3/02;G02F1/13;H01L21/306 |
主分类号 |
C03C15/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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