发明名称 ECHING APPARATUS WITH GUIDE BLADE
摘要 PURPOSE: An etching apparatus equipped with a guide blade is provided to prevent from precipitation of sludge into a spraying tool and attachment of sludge to a guide blade and a glass. CONSTITUTION: An etching apparatus equipped with a guide blade comprises a guide vane(10) and a spraying tool(20). The guide blade comprises a first and second side portions(12) which are mutually distanced and is formed along the longitudinal direction. An interval between the first and the second side portions are gradually narrower by moving towards a gravity direction. The spraying tool is located along the longitudinal directions of the first and the second side portions. The etchant is sprayed towards the first and the second side portions.
申请公布号 KR20120051842(A) 申请公布日期 2012.05.23
申请号 KR20100113154 申请日期 2010.11.15
申请人 FIS CO., LTD. 发明人 LEE, TAI HUI;PARK, JAE SIN;KIM, YU CHAN
分类号 C03C15/00;C25F3/02;G02F1/13;H01L21/306 主分类号 C03C15/00
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