发明名称 |
Method of generating cracks in polycrystalline silicon rod and crack generating apparatus |
摘要 |
A method of generating cracks in a polycrystalline silicon rod, comprising: heating a polycrystalline silicon rod; and subsequently performing local portion cooling of the polycrystalline silicon rod to apply a refrigerant fluid onto a spot-like area of a surface of the polycrystalline silicon rod. |
申请公布号 |
EP2280097(B1) |
申请公布日期 |
2012.05.23 |
申请号 |
EP20100171153 |
申请日期 |
2010.07.28 |
申请人 |
MITSUBISHI MATERIALS CORPORATION |
发明人 |
HAYASHIDA, SYUUHEI |
分类号 |
C30B15/02;B02C19/18;C30B15/00;C30B29/06 |
主分类号 |
C30B15/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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