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发明名称
METHOD FOR PRODUCING SEMICONDUCTOR SUBSTRATE
摘要
申请公布号
EP2045836(B1)
申请公布日期
2012.05.23
申请号
EP20070768119
申请日期
2007.07.04
申请人
SHIN-ETSU HANDOTAI CO., LTD.
发明人
OKA, SATOSHI;NOTO, NOBUHIKO
分类号
H01L21/02
主分类号
H01L21/02
代理机构
代理人
主权项
地址
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