| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To obtain a surface roughening method of a solar cell substrate and a method of manufacturing a solar battery cell, which can manufacture a solar battery cell excellent in photoelectric conversion characteristics, having the electrode of a high-definition pattern with little blurring. <P>SOLUTION: The surface roughening method includes a step of forming a first mask film capable of being processed by laser irradiation, in the one face side of a semiconductor substrate of first conductive type, a step of forming a second mask having laser resistance selectively in an electrode formation region on the first mask film, a step of forming a first mask, forming an opening reaching the semiconductor substrate in the first mask film by performing laser irradiation to the one face side of the semiconductor substrate, a step of removing the second mask, a step of forming a recess in a position corresponding to the opening in the one face side of the semiconductor substrate, by performing isotropic etching by wet etching to the one face side of the semiconductor substrate making the first mask as an etching mask, and a step of removing the first mask. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
