,申请号JP20010301233-传众专利搜索

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发明名称
摘要
申请公布号	JP4936621(B2)	申请公布日期	2012.05.23
申请号	JP20010301233	申请日期	2001.09.28
申请人		发明人
分类号	C23C16/455;H01L21/205	主分类号	C23C16/455
代理机构		代理人
主权项
地址

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