,申请号JP20070174904-传众专利搜索

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发明名称
摘要
申请公布号	JP4936129(B2)	申请公布日期	2012.05.23
申请号	JP20070174904	申请日期	2007.07.03
申请人		发明人
分类号	C23C16/44;H01L21/205;H01L21/3065	主分类号	C23C16/44
代理机构		代理人
主权项
地址

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