Patterning process and resist overcoat material,申请号EP20050252395-传众专利搜索

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发明名称	Patterning process and resist overcoat material
摘要
申请公布号	EP1589377(B1)	申请公布日期	2012.05.23
申请号	EP20050252395	申请日期	2005.04.18
申请人	SHIN-ETSU CHEMICAL CO., LTD.	发明人	HATAKEYAMA, JUN;HARADA, YUJI
分类号	G03F7/11;G03F7/20	主分类号	G03F7/11
代理机构		代理人
主权项
地址

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