| 摘要 |
A microelectromechanical system (MEMS) device with a mechanism layer (12, 48)) and a base (20). The top surface (21) of the base (20) is bonded to the mechanism layer (12, 48) and defines a gap (22) in the top surface (21) of the base (20). A portion (18, 62) of the mechanism layer (12) is deflected into the gap (22) until it contacts the base (20), and is bonded to the base (20). |
