发明名称 Device and method for the automatic control of the state of a surface of a plate by measuring the bonding speed
摘要 <p>Device for testing the surface state of a plate in which the speed of gluing together of two plates (11, 12) at the interface (13) between the plates is determined. Said device comprises a device for automatic detection of the onset of gluing and a device for automatic detection of the passage of a gluing wave between the two plates. The speed of gluing is proportional to the surface quality. An Independent claim is made for a method for checking the surface state of a plate by automatic determination of a gluing speed.</p>
申请公布号 EP1359390(B1) 申请公布日期 2012.05.23
申请号 EP20030291030 申请日期 2003.04.28
申请人 SOITEC 发明人 MALEVILLE, CHRISTOPHE;METRAL, FREDERIC
分类号 H01L21/02;H01L21/66;G01B11/30;G01N21/95;G01N21/956;H01L21/18;H01L27/12 主分类号 H01L21/02
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