发明名称 |
Device and method for the automatic control of the state of a surface of a plate by measuring the bonding speed |
摘要 |
<p>Device for testing the surface state of a plate in which the speed of gluing together of two plates (11, 12) at the interface (13) between the plates is determined. Said device comprises a device for automatic detection of the onset of gluing and a device for automatic detection of the passage of a gluing wave between the two plates. The speed of gluing is proportional to the surface quality. An Independent claim is made for a method for checking the surface state of a plate by automatic determination of a gluing speed.</p> |
申请公布号 |
EP1359390(B1) |
申请公布日期 |
2012.05.23 |
申请号 |
EP20030291030 |
申请日期 |
2003.04.28 |
申请人 |
SOITEC |
发明人 |
MALEVILLE, CHRISTOPHE;METRAL, FREDERIC |
分类号 |
H01L21/02;H01L21/66;G01B11/30;G01N21/95;G01N21/956;H01L21/18;H01L27/12 |
主分类号 |
H01L21/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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