| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a fluid control system wherein, when a target value rapidly increases, a time for the state quantity of fluid to reach the target value becomes short, and when the target value rapidly decreases, an overshoot falling short of the target value is reduced. <P>SOLUTION: This fluid control system is equipped with a fluid supply part 41 to supply fluid, a fluid state quantity detecting part 42 to detect the state quantity of the fluid, a device state detecting part 43 to detect the state quantity of the fluid supply part 41, a target value generating part to generate the target value of the fluid state quantity, a control part 45 to generate an instruction value so that the fluid state quantity approaches the target value, a manipulated variable median value generating part 46 to generate a manipulated variable median value so that the device state quantity approaches the instruction value, an integration stopping signal generating part 47 to generate an integration stopping signal when the manipulated variable median value is smaller than a lower limit value, and a manipulated variable restricting part 48 to generate the manipulated variable from the manipulated variable median value. <P>COPYRIGHT: (C)2007,JPO&INPIT |
