Semiconductor devices including Schottky diodes with controlled breakdown and methods of fabricating same

摘要

A semiconductor device (100) includes a semiconductor layer (114) having a first conductivity type, a metal contact (118) on the semiconductor layer and forming a Schottky junction (J4) with the semiconductor layer, and a semiconductor region (130) in the semiconductor layer. The semiconductor region and the semiconductor layer form a first p-n junction (J3) in parallel with the Schottky junction. The first p-n junction is configured to generate a depletion region in the semiconductor layer adjacent the Schottky junction when the Schottky junction is reversed biased to thereby limit reverse leakage current through the Schottky junction. The first p-n junction is further configured such that punch-through of the first p-n junction occurs at a lower voltage than a breakdown voltage of the Schottky junction when the Schottky junction is reverse biased.