| 发明名称 |
Dust- and pore-free high purity polysilicon granules |
| 摘要 |
<p>Polycrystalline silicon granules (A) consist of particles with a density over 99% of the theoretical solid density, and thus proportion of voids below 0.1%, and with surface roughness (Ra) below 150 nm. - An INDEPENDENT CLAIM is also included for a method for preparing (A).</p> |
| 申请公布号 |
EP1544167(B1) |
申请公布日期 |
2012.05.23 |
| 申请号 |
EP20040029834 |
申请日期 |
2004.12.16 |
| 申请人 |
WACKER CHEMIE AG |
发明人 |
WEIDHAUS, DIETER;CROESSMANN, IVO, DR.;SCHREIEDER, FRANZ |
| 分类号 |
C01B33/02;C01B33/021;C01B33/027;C01B33/03 |
主分类号 |
C01B33/02 |
| 代理机构 |
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