发明名称 A tension apparatus for patterning slit sheet
摘要 A tension apparatus for extending a patterning slit sheet included in a thin film deposition apparatus that can be simply applied to produce large-sized display devices on a mass scale and that improves manufacturing yield. The tension apparatus, wherein a plurality of patterning slits are formed along a first direction in the patterning slit sheet, and distances between adjacent patterning slits are different from each other, includes: a light source disposed to face the patterning slit sheet and irradiating light toward the patterning slit sheet; a tension member combined to at least one end of the patterning slit sheet, and applying a predetermined tensile force on the patterning slit sheet; and a master glass onto which light irradiated from the light source and passed through the patterning slit sheet is projected.
申请公布号 KR101146997(B1) 申请公布日期 2012.05.23
申请号 KR20100066992 申请日期 2010.07.12
申请人 发明人
分类号 H01L51/56 主分类号 H01L51/56
代理机构 代理人
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