SURFACE TREATMENT TO VERTICALITY TYPE SUBSTRATE TRANSFER APPARATUS

摘要

PURPOSE: A surface-processed vertical type substrate transfer apparatus is provided to minimize an amount of used chemical solutions existing on the surface of the substrate transfer apparatus by polishing the surface of the vertical type substrate transfer apparatus. CONSTITUTION: A frame(110) is comprised of a pair of support frames(112) and a pair of horizontal frames(114). A plurality of space parts is formed on the horizontal frame. A chucking member(120) performs a chucking process with respect to the outer circumferential surface of a substrate which is vertically inserted from the outside. The chucking member is comprised of driving tongs, a clamp, a support block, and a support device. The support block is comprised of a fixed stand and a support stand projected from the fixed stand.