发明名称 Method for manufacturing display device including laser irradiation and selective removing of a light absorber layer
摘要 A display device which can be manufactured with improved material use efficiency and through a simplified manufacturing process, and a manufacturing technique thereof. A light-absorbing layer is formed, an insulating layer is formed over the light-absorbing layer, the light-absorbing layer and the insulating layer are selectively irradiated with laser light to remove an irradiated region of the insulating layer so that a first opening is formed in the insulating layer, and the light-absorbing layer is selectively removed by using the insulating layer having the first opening as a mask so that a second opening is formed in the insulating layer and the light-absorbing layer. A conductive film is formed in the second opening to be in contact with the light-absorbing layer, thereby electrically connecting to the light-absorbing layer with the insulating layer interposed therebetween.
申请公布号 US8183067(B2) 申请公布日期 2012.05.22
申请号 US20070881233 申请日期 2007.07.26
申请人 YAMAZAKI SHUNPEI;TANAKA KOICHIRO;SHOJI HIRONOBU;KAWAMATA IKUKO;SEMICONDUCTOR ENERGY LABORATORY CO., LTD. 发明人 YAMAZAKI SHUNPEI;TANAKA KOICHIRO;SHOJI HIRONOBU;KAWAMATA IKUKO
分类号 H01L21/00;H01L21/44 主分类号 H01L21/00
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