发明名称 |
Thin film interference filter and bootstrap method for interference filter thin film deposition process control |
摘要 |
A thin film interference filter system includes a plurality of stacked films having a determined reflectance; a modeled monitor curve; and a topmost layer configured to exhibit a wavelength corresponding to one of the determined reflectance or the modeled monitor curve. The topmost layer is placed on the plurality of stacked films and can be a low-index film such as silica or a high index film such as niobia. |
申请公布号 |
US8184371(B2) |
申请公布日期 |
2012.05.22 |
申请号 |
US20100819560 |
申请日期 |
2010.06.21 |
申请人 |
MYRICK MICHAEL L.;HALLIBURTON ENERGY SERVICES, INC. |
发明人 |
MYRICK MICHAEL L. |
分类号 |
G02B1/10 |
主分类号 |
G02B1/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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