发明名称 |
Temperature controlled ion source |
摘要 |
An ion source is provided that utilizes a cooling plate and a gap interface to control the temperature of an ion source chamber. The gap interface is defined between the cooling plate and a wall of the chamber. A coolant gas is supplied to the interface at a given pressure where the pressure determines thermal conductivity from the cooling plate to the chamber to control the temperature of the interior of the chamber. |
申请公布号 |
US8183542(B2) |
申请公布日期 |
2012.05.22 |
申请号 |
US20100754318 |
申请日期 |
2010.04.05 |
申请人 |
BENVENISTE VICTOR;KOO BON-WOONG;PATEL SHARDUL;SINCLAIR FRANK;VARION SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC. |
发明人 |
BENVENISTE VICTOR;KOO BON-WOONG;PATEL SHARDUL;SINCLAIR FRANK |
分类号 |
G21K5/10 |
主分类号 |
G21K5/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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