发明名称 Temperature measuring apparatus and temperature measuring method
摘要 A temperature measuring apparatus includes a light source, a first splitter, a second splitter, a reference beam reflector, an optical path length adjuster, a reference beam transmitting member, a first to an nth measuring beam transmitting member and a photodetector. The temperature measuring apparatus further includes an attenuator that attenuates the reference beam reflected from the reference beam reflector to thereby make an intensity thereof closer to an intensity of the measurement beam reflected from the temperature measurement object.
申请公布号 US8182142(B2) 申请公布日期 2012.05.22
申请号 US20080043654 申请日期 2008.03.06
申请人 ABE JUN;MATSUDO TATSUO;KOSHIMIZU CHISHIO;TOKYO ELECTRON LIMITED 发明人 ABE JUN;MATSUDO TATSUO;KOSHIMIZU CHISHIO
分类号 G01J5/00;G01B9/02 主分类号 G01J5/00
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