发明名称 Methods of forming conductive vias through substrates, and structures and assemblies resulting therefrom
摘要 Methods of forming conductive elements on and in a substrate include forming a layer of conductive material over a surface of a substrate prior to forming a plurality of vias through the substrate from an opposing surface of the substrate to the layer of conductive material. In some embodiments, a temporary carrier may be secured to the layer of conductive material on a side thereof opposite the substrate prior to forming the vias. Structures, including workpieces formed using such methods, are also disclosed.
申请公布号 US8183151(B2) 申请公布日期 2012.05.22
申请号 US20070744592 申请日期 2007.05.04
申请人 LAKE RICKIE C.;MICRON TECHNOLOGY, INC. 发明人 LAKE RICKIE C.
分类号 H01L21/4763 主分类号 H01L21/4763
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