发明名称 |
Miniature pressure transducer |
摘要 |
A miniature pressure transducer is disclosed which is able to operate at high temperatures. The pressure transducer is provided on a substrate comprising an elongate silicon base portion with one or more contact areas formed at one end and a diaphragm formed at the opposite distal end. A plurality of piezoresistive elements are provided on the diaphragm, preferably in a Wheatstone Bridge arrangement, and connected to the contact areas using interconnects. The diaphragm extends across substantially the entire effective width of the elongate base portion providing a compact width while still maintaining a sensitive pressure sensing capability. |
申请公布号 |
US8183975(B2) |
申请公布日期 |
2012.05.22 |
申请号 |
US20090564527 |
申请日期 |
2009.09.22 |
申请人 |
CRADDOCK RUSSELL;KING JAMES ANTHONY;GE INFRASTRUCTURE SENSING, INC. |
发明人 |
CRADDOCK RUSSELL;KING JAMES ANTHONY |
分类号 |
H01C10/10 |
主分类号 |
H01C10/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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