TUNGSTEN DIGITLINES AND METHODS OF FORMING AND OPERATING THE SAME

摘要

Methods, devices, and systems for using and forming tungsten digitlines have been described. The tungsten digitlines formed according to embodiments of the present disclosure can be formed with a tungsten (W) monolayer on a tungsten nitride (WN_x) substrate, a boron (B) monolayer on the W monolayer, and a bulk W layer on the B monolayer.